HIGH FREQUENCY IMPEDANCE MEASUREMENT METHOD

PROBLEM TO BE SOLVED: To precisely measure high frequency impedance of an object to be measured having a high-frequency impedance sufficiently smaller than the line impedance even when an exact value of the line impedance is not known.SOLUTION: A first line 11 and a second line 12 are arranged in parallel and an object 40 to be measured for measuring high frequency impedance is disposed so as to be electromagnetically coupled with the first line. A mode change amount between a common mode and a differential mode in transmission from input ends of the first line and the second line to output ends of the first line and the second line or in the reflection of the input end S, S, S, or Sis measured, and, based on the mode change amount, the high frequency impedance is measured.SELECTED DRAWING: Figure 1 【課題】線路インピーダンスの正確な値が既知でなくとも、線路インピーダンスダンスに比べて十分に小さい高周波インピーダンスを有する被測定物の高周波インピーダンスを正確に測定できるようにすること。【解決手段】第１線路１１と第２線路１２とを平行に配設し、高周波インピーダンスを測定する被測定物４０を、第１線路と電磁結合するように配置し、第１線路及び第２線路の入力端から第１線路及び第２線路の出力端への伝送における、又は、入力端の反射における、コモンモードとディファレンシャルモード間のモード転換量Ｓcd21、Ｓdc21、Ｓcd11、又は、Ｓdc11を測定し、モード転換量に基づいて被測定物の高周波インピーダンスを測定する。【選択図】図１