FLOATING AMOUNT CALCULATION DEVICE, COATING DEVICE, AND COATING METHOD

PROBLEM TO BE SOLVED: To precisely find a floating amount from a stage regardless of type of substrate in a coating device that applies coating liquid to the substrate while conveying the substrate in a state of floating over the stage.SOLUTION: A floating amount calculation device includes: a board thickness measuring sensor for detecting a vertical direction position of a suction face that sucks a lower face of a substrate of a sucking member, and a vertical direction position of an upper face region of a sucked portion sucked by the sucking member of the substrate; a floating measuring sensor for detecting a vertical direction position of an upper face of a stage and a vertical direction position of an upper face of the substrate transported upward of the stage; a board thickness calculation unit for calculating the board thickness of the substrate on the basis of the vertical direction position of the suction face and the vertical direction position of the upper face region of the sucked portion detected by the board thickness measuring sensor; and a floating amount calculation unit for calculating an amount of floating of the substrate on the basis of the vertical direction position of the upper face of the stage and the vertical direction position of the upper face of the substrate detected by the floating measuring sensor and the board thickness calculated by the board thickness calculation unit.SELECTED DRAWING: Figure 6 【課題】基板をステージから浮上させつつ搬送しながら基板に塗布液を塗布する塗布装置において、基板の種類を問わず、ステージからの浮上量を高精度に求める。【解決手段】吸着部材のうち基板の下面を吸着する吸着面の鉛直方向位置と、基板のうち吸着部材によって吸着された被吸着部位の上面領域の鉛直方向位置とを検出する板厚測定用センサと、ステージの上面の鉛直方向位置と、ステージの上方に搬送された基板の上面の鉛直方向位置とを検出する浮上測定用センサと、板厚測定用センサにより検出された吸着面の鉛直方向位置および被吸着部位の上面領域の鉛直方向位置に基づいて基板の板厚を算出する板厚算出部と、浮上測定用センサにより検出されたステージの上面の鉛直方向位置および基板の上面の鉛直方向位置と、板厚算出部により算出された板厚とに基づいて基板の浮上量を算出する浮上量算出部とを備えている。【選択図】図６