SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To provide a scanning electron microscope in which secondary electron can be detected by a secondary electron detector, while preventing contamination of a reflection electron detector during processing.SOLUTION: A scanning electron microscope 100 having a charged particle beam...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AOSHIMA MAKOTO, KURAMOTO KEN, MATSUDA YOSHINORI, OHORI YUICHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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