OPTICAL DEFLECTOR, OPTICAL SCANNER, IMAGE FORMING APPARATUS, AND IMAGE PROJECTION DEVICE
PROBLEM TO BE SOLVED: To provide an optical deflector that improves reliability by avoiding in advance the generation of an electric field concentrated part that leads to breakage of contact parts or the like.SOLUTION: An optical deflector 1 comprises: a mirror part 7 that is provided with a reflect...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an optical deflector that improves reliability by avoiding in advance the generation of an electric field concentrated part that leads to breakage of contact parts or the like.SOLUTION: An optical deflector 1 comprises: a mirror part 7 that is provided with a reflection surface 5 reflecting light; and inside piezoelectric actuators 10a to 10d and outside piezoelectric actuators 11 and 12 that drive the mirror part. The optical deflector includes contact parts 33u that are provided at two places at both ends in a current supply direction of a piezoelectric cantilever 11m of the outside piezoelectric actuator 11 and joined to lead wires 141 and 142 that supply potential to an upper electrode 27; and contact parts 33u' as second junctions that are joined to a lead wire 143 different from the lead wires 141 and 142.SELECTED DRAWING: Figure 6
【課題】コンタクト部等の破損に至る電界集中部の発生を未然に回避して、信頼性が向上した光偏向器を提供する。【解決手段】光を反射する反射面5が設けられたミラー部7と、ミラー部を駆動する内側圧電アクチュエータ10a〜10d及び外側圧電アクチュエータ11,12を備えて構成される光偏向器1において、外側圧電アクチュエータ11の圧電カンチレバー11mへの電流供給方向の両端2箇所に設けられ、上部電極27へ電位を供給するリード線141、142に接合されるコンタクト部33uと、リード線141、142とは別のリード配線143に接合される第2の接合部としてのコンタクト部33u'を有する。【選択図】図6 |
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