CERAMIC HEATER

PROBLEM TO BE SOLVED: To provide a ceramic heater capable of preventing adhesion of particles to a substrate at the time of heating the substrate and capable of adjusting temperature distribution of the entire substrate during substrate heating with a simple heating element configuration.SOLUTION: A ceramic heater 10 includes a ceramic substrate having a substrate placement surface 11S on which a plurality of convex portions 11P on which a substrate is placed on one surface are formed and a heating element buried in the substrate, and the substrate placement surface has a plurality of regions with different emissivity.SELECTED DRAWING: Figure 1 【課題】基板加熱時の基板へのパーティクルの付着を防止し、かつ単純な発熱体構成で基板加熱時の基板全体の温度分布の調整が可能なセラミックスヒータを提供する。【解決手段】セラミックスヒータ１０は、１の面に基板が載置される複数の凸部１１Ｐが形成された基板載置面１１Ｓを有するセラミック基体と、基体に埋設された発熱体と、を有するセラミックスヒータであって、基板載置面は、輻射率の異なる複数の領域を有する。【選択図】図１