INSPECTION DEVICE, INSPECTION METHOD, INSPECTION PROGRAM, STORAGE MEDIUM AND INSPECTION SYSTEM

PROBLEM TO BE SOLVED: To provide an inspection device capable of conducting a highly accurate inspection while reducing an inspection time, an inspection method, an inspection program, a storage medium and an inspection system.SOLUTION: The inspection device includes: an acquisition unit for acquiring data indicating a time change of a surface temperature of an inspection object; a conversion unit for performing a phase conversion to the data indicating the time change of the surface temperature acquired by the acquisition unit and calculating data indicating a frequency change of a phase value; and a determination unit for determining a defect of the inspection object on the basis of a peak that the phase value calculated by the conversion unit indicates in a frequency area whose frequency is equal to or greater than a prescribed frequency.SELECTED DRAWING: Figure 11 【課題】検査時間を短縮するとともに高精度な検査を行うことが可能な検査装置、検査方法、検査プログラム、記憶媒体、および検査システムを提供する。【解決手段】本発明の一態様の検査装置は、検査対象物の表面温度の時間変化を示すデータを取得する取得部と、前記取得部によって取得された前記表面温度の時間変化を示すデータに対して位相変換を行い、位相値の周波数変化を示すデータを算出する変換部と、前記変換部により算出された前記位相値が、所定周波数以上の周波数領域で示すピークに基づいて、前記検査対象物の欠陥を判定する判定部と、を備える。【選択図】図１１