NITRIDING METHOD AND NITRIDING EQUIPMENT

PROBLEM TO BE SOLVED: To provide a nitriding method wherein: on the surface of a treatment object such as a tool or a die, a nitrogen compound layer such as iron is formed, so that problems such as surface fog, increase in surface roughness, rise in frictional coefficient, or deterioration of releasability, are prevented; and also, even in a tool or die having a slit (fine structure), the inner surface of the narrow slit can be treated uniformly.SOLUTION: Nitriding is conducted using a plasma 31 which contains nitrogen atoms, which is generated by irradiating an electron beam 29 or a microwave with gas containing nitrogen.SELECTED DRAWING: Figure 1 【課題】工具や金型などの処理対象物の表面に、鉄等の窒素化合物層が形成されることによる表面の曇り、表面粗さの増加、摩擦係数の上昇、離型性の低下等の問題が生じ難く、また、スリット（微細な構造）を持つ工具や金型においても、狭いスリットの内面を均一に処理することが可能になる窒化処理方法を提供する。【解決手段】窒素を含むガスに電子ビーム２９又はマイクロ波を照射して生成する窒素原子を含むプラズマ３１を用いて窒化処理を行う。【選択図】図１