OPTICAL SCANNING HEIGHT MEASURING DEVICE

PROBLEM TO BE SOLVED: To provide an optical scanning height measuring device that can efficiently measure the shape of a desired portion of a measuring object.SOLUTION: Specification of one or more reference points and a point of measurement is received. Light emitted from a light emitting part 231 is deflected by a deflection part, and a field of measurement is irradiated with the light. The deflection part is controlled so that portions in the field of measurement corresponding respectively to the one or more reference points and point of measurement are sequentially irradiated with light. Light from the field of measurement is received by a light receiving part, and a light receiving signal indicating the quantity of received light is output. The coordinates corresponding respectively to the one or more reference points and point of measurement are calculated on the basis of the deflection direction of the deflection part or the irradiation position of the light deflected by the deflection part, and the light receiving signal output from the light receiving part. A reference surface is acquired on the basis of the coordinates corresponding to the one or more reference points. The height of a portion of a measuring object S corresponding to the point of measurement is calculated with reference to the reference surface on the basis of the coordinates corresponding to the point of measurement.SELECTED DRAWING: Figure 3 【課題】測定対象物の所望の部分の形状を効率よく測定することが可能な光走査高さ測定装置を提供する。【解決手段】１または複数の基準点と測定点との指定が受け付けられる、光出射部２３１から出射された光が偏向部により偏向され、測定領域に照射される。１または複数の基準点と測定点とにそれぞれ対応する測定領域内の部分に光が順次照射されるように偏向部が制御される。測定領域からの光が受光部により受光され、受光量を示す受光信号が出力される。偏向部の偏向方向または偏向部により偏向された光の照射位置と受光部により出力される受光信号とに基づいて、１または複数の基準点および測定点にそれぞれ対応する座標が算出される。１または複数の基準点に対応する座標に基づいて、基準面が取得される。測定点に対応する座標に基づいて、測定点に対応する測定対象物Ｓの部分の高さが基準面を基準として算出される。【選択図】図３