METHOD OF MEASURING SUCK-UP PRESSURE DISTRIBUTION

PROBLEM TO BE SOLVED: To provide a method of measuring suck-up pressure distribution capable of measuring distribution of suck-up pressure when sucking a metal foil with a magnet array having plural magnets arrayed.SOLUTION: A metal foil 5 is disposed on a magnet array being interposed by a support plate 4, and the metal foil is sucked and held on the upper plane of a support plate by means of magnetic force from each magnet 32. A gas pressure is given toward the metal foil from the support plate to act a resistance identical thereto over the entire of a predetermined range to the lower face of the metal foil. In this state, the displacement magnitude of the metal foil is measured in the range of the metal foil on which the resistance acting thereon. Based on the measured displacement magnitude, the distribution of the suck-up pressure is obtained.SELECTED DRAWING: Figure 2 【課題】複数個の磁石を列設してなる磁石アレイによって金属箔を吸着したときの吸着圧力の分布を測定することができる吸着圧力分布の測定方法を提供する。【解決手段】磁石アレイ上に、支持板４を介して金属箔５を設置することで、各磁石３２からの磁力で支持体上面に金属箔を吸着保持させる。支持体から金属箔に向けて気体圧力を付与し、金属箔に対しその下面の所定範囲全体に亘って同等の抗力を作用させる。この状態で、抗力が作用する金属箔の範囲にてこの金属箔の変位量を測定し、この測定した変位量から吸着圧力の分布を得る。【選択図】図２