DILUENT LIQUID MANUFACTURING APPARATUS AND DILUENT LIQUID MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To continuously and stably manufacture a diluent adjusted to a predetermined concentration in a wide concentration range.SOLUTION: A diluent manufacturing apparatus 10 has: a first tube 11 supplying a first liquid; a tank 12a storing a second liquid; a plurality of second tubes 13 which connect the tank 12a with the first tube 11 and are connected to each other in parallel; a pressure adjustment section 18 which adjusts a pressure in the tank 12a, pressure-feeds the second liquid in the tank 12a through at least one of the plurality of second tubes 13, and supplies the second liquid to the first tube 11; and a control section 20 which adjusts an addition amount of the second liquid to the first liquid by the pressure adjustment section 18 so that the concentration of the diluent becomes predetermined concentration on the basis of measurement values of a flow rate of the first liquid flowing through the first tube 11 or the diluent and concentration of the diluent, where at least one of the inner diameters and the lengths of the plurality of second tubes 13 are different from each other.SELECTED DRAWING: Figure 2 【課題】所定の濃度に調整された希釈液を幅広い濃度範囲にわたって継続的かつ安定的に製造する。【解決手段】希釈液製造装置１０は、第１の液体を供給する第１の配管１１と、第２の液体を貯留するタンク１２ａと、タンク１２ａと第１の配管１１とを接続し、互いに並列に接続された複数の第２の配管１３と、タンク１２ａ内の圧力を調整する圧力調整部１８であって、タンク１２ａ内の第２の液体を複数の第２の配管１３の少なくとも１つを通じて圧送して第１の配管１１に供給する圧力調整部１８と、第１の配管１１内を流れる第１の液体または希釈液の流量と希釈液の濃度との測定値に基づいて、希釈液の濃度が所定の濃度になるように、圧力調整部１８による第１の液体への第２の液体の添加量を調整する制御部２０と、を有し、複数の第２の配管１３は、内径および長さの少なくとも一方が互いに異なる。【選択図】図２