SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a semiconductor device having good electric characteristics.SOLUTION: A semiconductor device comprises: a first conductor arranged on a substrate; a first insulator arranged on the first conductor; an oxide arranged on the first insulator; a second insulator arranged...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKEUCHI TOSHIHIKO, SANO SHIORI, YAMAZAKI SHUNPEI, MURAKAWA TSUTOMU
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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