CARRIER FOR SUBSTRATE TRANSPORT DEVICE

PROBLEM TO BE SOLVED: To provide a carrier for a substrate transport device capable of holding a processed substrate having a rectangular contour in such a manner that the processed substrate is prevented from being deformed by a dead weight eve if the processed substrate is thin, when transporting the processed substrate while holding it in an attitude that the processed substrate stands up in a vertical direction.SOLUTION: A carrier Ca comprises a tabular frame body 2. The frame body includes: a substrate receiving part 4 to which a lower side of a processed substrate in a standing attitude is abutted; a mask part 3 to which a peripheral edge of the processed substrate is abutted over all the circumference and which divides a range of processing to the processed substrate; and multiple clamps 5 which locally press edges of the processed substrate in relative to the mask part. The clamp includes: a blade part 57 which is linearly pressure-welded to the processed substrate; and an operation part 54 which freely moves the blade part between a pressure-welding position where the blade part is pressure-welded to the processed substrate, and a retraction position where the blade part is separated from the processed substrate.SELECTED DRAWING: Figure 2 【課題】矩形の輪郭を持つ被処理基板を鉛直方向に起立させた姿勢で保持し、搬送する場合に、その板厚が薄い場合でも自重で変形しないように被処理基板を保持できる基板搬送装置用のキャリアを提供する。【解決手段】本発明のキャリアＣａは板状の枠体２を有し、枠体が、起立姿勢の被処理基板の下辺が当接する基板受け部４と、被処理基板の周縁部がその全周に亘って当接して当該被処理基板に対する処理範囲を区画するマスク部３と、マスク部に対して被処理基板の縁部を局所的に押圧する複数個のクランプ５とを備える。クランプが、被処理基板に対し線状に圧接するブレード部５７と、ブレード部が被処理基板に圧接する圧接位置とブレード部が被処理基板から離間した退避位置との間でブレード部を移動自在とする操作部５４とを有する。【選択図】図２