INSPECTION SYSTEM, INSPECTION METHOD, INSPECTION PROGRAM, AND STORAGE MEDIUM

PROBLEM TO BE SOLVED: To provide an inspection system, an inspection method, an inspection program, and a storage medium that can inspect an inspection object over a wide range with high accuracy.SOLUTION: An inspection system of one aspect of the present invention includes: a heating device for hea...

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Bibliographische Detailangaben
Hauptverfasser:	KOYAMA MASASHI, OGASAWARA NAGAHISA, ISHIKAWA SHINJI, UTSUNOMIYA MAKOTO, KASANO HIDEYUKI, HATTA HIROSHI, NISHITANI YUTAKA, FUKUI RYO, YAMADA HIROYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an inspection system, an inspection method, an inspection program, and a storage medium that can inspect an inspection object over a wide range with high accuracy.SOLUTION: An inspection system of one aspect of the present invention includes: a heating device for heating an inspection object; an imaging device for taking an infrared image of the inspection object heated by the heating device; a sensor for detecting the state of a surface of the inspection object; and an inspection device for generating an inspection image of the inspection object. The inspection device generates the inspection image by combining infrared images consecutively taken by the imaging device in tune with unified movement of the heating device, the imaging device, the sensor, and the inspection device on the basis of a detection value by the sensor.SELECTED DRAWING: Figure 1 【課題】検査対象物に対して広範囲かつ高精度に検査を行うことができる検査システム、検査方法、検査プログラム、および記憶媒体を提供する。【解決手段】本発明の一態様の検査システムは、検査対象物を加熱する加熱装置と、前記加熱装置によって加熱された前記検査対象物の赤外線画像を撮像する撮像装置と、前記検査対象物の表面状態を検出するセンサと、前記検査対象物の検査画像を生成する検査装置と、を備える。前記検査装置は、前記センサの検出値に基づいて、前記加熱装置、前記撮像装置、前記センサ、および前記検査装置が一体で移動するのに伴って前記撮像装置により連続的に撮像された赤外線画像を合成して前記検査画像を生成する。【選択図】図１