PROCESSING UNIT

PROBLEM TO BE SOLVED: To provide a processing unit which restrains deformation on a work-piece by temperature difference.SOLUTION: A processing unit 200 for performing deposition or etching on a part of the work-piece 10 includes: a vacuum vessel 100 having a first mold 110 with a first concave port...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MOGI KAZUNARI, ASHITAKA YU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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