ABNORMALITY DETECTION SYSTEM

PROBLEM TO BE SOLVED: To provide an abnormality detection system capable of foreseeing an abnormality by detecting a minute change occurring during a short period of time.SOLUTION: An abnormality detection system of an embodiment includes an acquisition unit that acquires state information, which represents the state of each of parts of a semiconductor manufacturing apparatus, at predetermined intervals, a storage unit that stores as a log the state information, which is acquired by the acquisition unit, in predetermined units, an arithmetic unit that produces a monitoring band, which is used to monitor the state of each of the parts of the semiconductor manufacturing apparatus, on the basis of the log, and a determination unit that determines on the basis of the state information and monitoring band whether the state of each of the parts of the semiconductor manufacturing apparatus is abnormal.SELECTED DRAWING: Figure 1 【課題】短期間に発生する微小な変化を検出して異常を予知することが可能な異常検知装置を提供すること。【解決手段】一実施形態の異常検知装置は、半導体製造装置の各部の状態を示す状態情報を所定の周期で収集する収集部と、前記収集部により収集された前記状態情報を所定の単位ごとにログとして格納する格納部と、前記ログに基づいて、前記半導体製造装置の各部の状態を監視する監視バンドを生成する演算部と、前記状態情報と前記監視バンドとに基づいて、前記半導体製造装置の各部の状態が異常であるか否かを判定する判定部と、を有する。【選択図】図１