ELECTROLESS COPPER PLATING, REMOVAL LIQUID OF CATALYST USED FOR DEPOSITION OF ELECTROLESS COPPER PLATING, AND APPLICATION THEREOF

PROBLEM TO BE SOLVED: To provide electroless copper plating; and to provide a technology capable of removing in one step, a catalyst used for deposition of electroless copper plating.SOLUTION: There are provided: electroless copper plating containing an acid and a thiourea compound; a removal liquid...

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Bibliographische Detailangaben
Hauptverfasser: TANIMOTO JUICHI, SHINJO SAYAKA
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide electroless copper plating; and to provide a technology capable of removing in one step, a catalyst used for deposition of electroless copper plating.SOLUTION: There are provided: electroless copper plating containing an acid and a thiourea compound; a removal liquid of a catalyst used for deposition of electroless copper plating; and a removal method of the catalyst used for electroless copper plating and deposition of electroless copper plating in which a substrate provided with electroless copper plating is treated by the removal liquid.SELECTED DRAWING: None 【課題】無電解銅めっきおよび無電解銅めっきの析出に用いられた触媒を1工程で除去できる技術を提供する。【解決手段】酸およびチオ尿素化合物を含有することを特徴とする無電解銅めっきおよび無電解銅めっきの析出に用いられた触媒の除去液および無電解銅めっきを設けた基板を、前記除去液で処理することを特徴とする無電解銅めっきおよび無電解銅めっきの析出に用いられた触媒の除去方法。【選択図】なし