SHAPE MEASUREMENT APPARATUS

PROBLEM TO BE SOLVED: To provide a shape measurement apparatus of a compact constitution capable of swiftly measuring a surface shape of a measurement object with high accuracy in a wide measurement range.SOLUTION: A support part 125 supports a movable portion 141 and a parallel portion 142 which are driven in an opposite direction by a drive part 150 to reciprocally move with respect to the support part 125. The movable portion 141 has a beam splitter and a mirror attached thereto. A beam splitter guides a measuring beam and a reference beam to a measurement object S and a mirror, and a beam of interference light between the measuring beam which is reflected by the measurement object S and the reference beam which is reflected by the mirror is guided to a light receiving part. When the movable portion 141 moves reciprocally, the difference between the optical path length of the measuring beam and the optical path length of the reference beam changes. Based on the relative position of the movable portion 141 with respect to the support part 125 and the amount of light received by plural pixels on the light receiving part, the surface shape of plural portions of the measurement object S is acquired.SELECTED DRAWING: Figure 5 【課題】コンパクトに構成しつつ広い測定範囲で高速かつ高精度で測定対象物の表面形状を測定することが可能な形状測定装置を提供する。【解決手段】可動部１４１と平衡部１４２とが支持部１２５に支持され、駆動部１５０により互いに逆方向に支持部１２５に対して往復移動される。可動部１４１にビームスプリッタおよびミラーが取り付けられる。ビームスプリッタにより測定光および参照光が測定対象物Ｓおよびミラーにそれぞれ導かれ、測定対象物Ｓで反射された測定光とミラーで反射された参照光との干渉光が受光部に導かれる。可動部１４１が往復移動することにより測定光の光路長と参照光の光路長との差が変化する。支持部１２５に対する可動部１４１の相対位置と受光部の複数の画素の受光量とに基づいて、測定対象物Ｓの複数の部分の表面形状が取得される。【選択図】図５