SEMICONDUCTOR OPTICAL MODULATOR AND OPTICAL COMMUNICATION MODULE
PROBLEM TO BE SOLVED: To prevent occurrence of removal of an electrode and cracks of the electrode in the electrode to which an electric signal for driving a semiconductor optical modulator is applied.SOLUTION: A semiconductor optical modulator 1 modulating a laser beam according to an electric sign...
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Sprache: | eng ; jpn |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent occurrence of removal of an electrode and cracks of the electrode in the electrode to which an electric signal for driving a semiconductor optical modulator is applied.SOLUTION: A semiconductor optical modulator 1 modulating a laser beam according to an electric signal comprises an electrode 300 which is provided above an embedded layer and an active layer of at least a part of the semiconductor optical modulator 1 and to which an electric signal is transmitted. In the electrode 300, a step structure is provided on at least a part of a periphery of a bonding pad electrode part 11 connected to a bonding wire 8 for transmitting the electric signal.SELECTED DRAWING: Figure 1
【課題】半導体光変調器を駆動するための電気信号が印加される電極において、電極剥がれと電極割れが発生することを防止する。【解決手段】電気信号に従ってレーザー光を変調する半導体光変調器1は、半導体光変調器1の少なくとも一部の埋込層と活性層の上方に設けられた、電気信号が伝送される電極300を備え、電極300のうち、電気信号を伝送するボンディングワイヤ8と接続されるボンディングパッド電極部11の周縁部の少なくとも一部に段差構造を設けた。【選択図】 図1 |
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