CRACK INSPECTION APPARATUS AND CRACK INSPECTION METHOD

PROBLEM TO BE SOLVED: To provide a crack inspection apparatus and a crack inspection method with high inspection efficiency.SOLUTION: A crack inspection apparatus 1 comprises a laser optical system 10 that can irradiate positions different from each other in an inspection object S with a laser beam...

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Bibliographische Detailangaben
Hauptverfasser:	OKUDA KENTARO, WASHIYA TAISUKE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a crack inspection apparatus and a crack inspection method with high inspection efficiency.SOLUTION: A crack inspection apparatus 1 comprises a laser optical system 10 that can irradiate positions different from each other in an inspection object S with a laser beam L1 and measurement means that measures a temperature distribution of the inspection object S irradiated with the laser beam L1.SELECTED DRAWING: Figure 1 【課題】検査効率が高いクラック検査装置及びクラック検査方法を提供する。【解決手段】クラック検査装置１は、レーザビームＬ１を被検査体Ｓにおける相互に異なる位置に照射可能なレーザ光学系１０と、レーザビームＬ１が照射された被検査体Ｓの温度分布を測定する測定手段と、を備える。【選択図】図１