DRYER AND HEAT TREATMENT SYSTEM

PROBLEM TO BE SOLVED: To provide a technology of reducing heat radiation from a housing supporting a heat element to the outside.SOLUTION: A dryer 40 is configured to dry a coating film formed on a substrate 5. The dryer 40 includes: an infrared heater 42 configured to radiate heat in a -z direction as a first direction; a housing part 44 supporting the infrared heater 42 on its inside; an outer wall part 46 covering an outer surface of the housing part 44 so as to form an interval 40S between the housing part 44 and the outer surface, and forming an opening 46op communicating with the internal 40S; and a discharge part 50 configured to discharge atmosphere of the interval 40S between the housing part 44 and the outer wall part 46. The opening 46op formed by the outer wall part 46 faces to the -z direction.SELECTED DRAWING: Figure 3 【課題】発熱体を支持する筐体から外部への熱放射を低減する技術を提供する。【解決手段】乾燥装置４０は、基材５に形成された塗布膜を乾燥させる。乾燥装置４０は、第１方向である−ｚ方向に熱を放射する赤外線ヒータ４２と、赤外線ヒータ４２を内側にて支持する筐体部４４と、筐体部４４の外面との間に隙間４０Ｓを形成しつつ筐体部４４の外面を覆い、かつ、隙間４０Ｓに連通する開口４６ｏｐを形成する外壁部４６と、筐体部４４及び外壁部４６の隙間４０Ｓの雰囲気を排出する排出部５０とを備える。外壁部４６が形成する開口４６ｏｐは、−ｚ方向に向いている。【選択図】図３