ULTRAPURE WATER MANUFACTURING DEVICE

PROBLEM TO BE SOLVED: To provide an ultrapure water manufacturing device that can reduce the heat source cost of a heat exchanger, the heat exchanger being for heating ultrapure water to produce warm ultrapure water.SOLUTION: Secondary pure water from a subsystem 4 is heated with a heat exchanger 6...

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Bibliographische Detailangaben
1. Verfasser:	HORII SHIGEKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BLASTING CHEMISTRY FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEATGENERATING MEANS, IN GENERAL HEATING LIGHTING MECHANICAL ENGINEERING METALLURGY RANGES TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an ultrapure water manufacturing device that can reduce the heat source cost of a heat exchanger, the heat exchanger being for heating ultrapure water to produce warm ultrapure water.SOLUTION: Secondary pure water from a subsystem 4 is heated with a heat exchanger 6 and a heat exchanger 10, and is sent to a use point. A heat source of the heat exchanger 6 is returning warm ultrapure water from the use point. A heat source fluid of the heat exchanger 10 is warm water that has been heated with a heat pump 20 and a vapor-type heat exchanger 15. Heat sources of the heat pump 20 are warm discharge water from the use point and a retentate of a UF membrane separation device 11A.SELECTED DRAWING: Figure 1 【課題】超純水を加熱して温超純水とするための熱交換器の熱源コストを低減することができる超純水製造装置を提供する。【解決手段】サブシステム４からの二次純水を熱交換器６及び熱交換器１０で加熱してユースポイントへ送る。熱交換器６の熱源はユースポイントからの戻り温超純水である。熱交換器１０の熱源流体は、ヒートポンプ２０及び蒸気式熱交換器１５で加熱された温水である。ヒートポンプ２０の熱源はユースポイントからの温排水及びＵＦ膜分離装置１１Ａの濃縮水である。【選択図】図１