ROTATION MECHANISM AND FILM THICKNESS MONITOR COMPRISING ROTATION MECHANISM

PROBLEM TO BE SOLVED: To ensure that a rotation mechanism arranged in a vacuum chamber to rotationally drive a body to be rotated has a structure in which a rolling bearing hardly fatigues, and has a long life.SOLUTION: A rotation mechanism comprises: a motor 2; an output shaft 3 that receives power...

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Bibliographische Detailangaben
Hauptverfasser:	FURUSE HARUKUNI, MAEDA AKIHIRO, KOTAKA MANABU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BEARINGS BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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