ROTATION MECHANISM AND FILM THICKNESS MONITOR COMPRISING ROTATION MECHANISM

PROBLEM TO BE SOLVED: To ensure that a rotation mechanism arranged in a vacuum chamber to rotationally drive a body to be rotated has a structure in which a rolling bearing hardly fatigues, and has a long life.SOLUTION: A rotation mechanism comprises: a motor 2; an output shaft 3 that receives power...

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Bibliographische Detailangaben
Hauptverfasser:	FURUSE HARUKUNI, MAEDA AKIHIRO, KOTAKA MANABU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BEARINGS BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To ensure that a rotation mechanism arranged in a vacuum chamber to rotationally drive a body to be rotated has a structure in which a rolling bearing hardly fatigues, and has a long life.SOLUTION: A rotation mechanism comprises: a motor 2; an output shaft 3 that receives power from the motor to rotationally drive a body 7 to be rotated; and a rolling bearing 6 externally fitted onto the output shaft to support the output shaft. A rotating body 4 is provided at a tip part of the output shaft, the rotating body is connected to the body to be rotated via rotating force transmitting means 5, and an outer ring 61 of the rolling bearing is fitted into groove parts 51a and 51b provided in the rotating force transmitting means.SELECTED DRAWING: Figure 2 【課題】真空チャンバ内に配置されて被回転体を回転駆動する回転機構を、転がり軸受が疲労し難い構造を持ち、長寿命のものにする。【解決手段】モータ２と、モータからの動力を受けて被回転体７を回転駆動する出力軸３と、出力軸に外挿されてこの出力軸を支承する転がり軸受６とを備える。出力軸の先端部に回転体４が設けられ、回転体が回転力伝達手段５を介して被回転体に連結されると共に、転がり軸受の外輪６１が回転力伝達手段に設けた溝部５１ａ，５１ｂに嵌合される。【選択図】図２