PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC MOTOR, ROBOT, ELECTRONIC COMPONENT CARRIER DEVICE AND PRINTER

PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of increasing the thickness of the piezoelectric element while satisfactorily improving electrical characteristics while satisfactorily dispersion of electrode component into piezoelectric body layer, a piezoelectric actuator including...

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Bibliographische Detailangaben
Hauptverfasser: KISHIDA SANSEI, ASAKAWA TSUTOMU, FURUBAYASHI TOMOKAZU
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of increasing the thickness of the piezoelectric element while satisfactorily improving electrical characteristics while satisfactorily dispersion of electrode component into piezoelectric body layer, a piezoelectric actuator including such piezoelectric element, piezoelectric motor, a robot, an electronic component carrier device and a printer.SOLUTION: The piezoelectric element includes: a substrate; a first electrode disposed on the substrate; a piezoelectric body layer disposed on the first electrode, which is constituted of plural layers including a piezoelectric body material, and total thickness of the plural layers is within a range of 1.6-10 μm; and an intermediate layer containing titanium disposed between the piezoelectric body layers.SELECTED DRAWING: Figure 1 【課題】圧電体層への電極成分の拡散を十分に抑制するとともに、電気的特性を十分に向上させつつ、圧電素子の厚さを厚くすることができる圧電素子を提供すること、また、かかる圧電素子を備える圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置およびプリンターを提供すること。【解決手段】基板と、前記基板上に配置されている第1電極と、前記第1電極上に配置され、圧電体材料を含んで構成されている複数層を有し、前記複数層の厚さの合計が1.6μm以上10μm以下の範囲内にある圧電体層と、前記圧電体層の層間に配置され、チタンを含んで構成されている中間層と、を備えることを特徴とする圧電素子。【選択図】図1