PROBER

PROBLEM TO BE SOLVED: To provide a prober which allows for high accuracy wafer level inspection of high-frequency measurement or dynamic characteristics, while improving the work efficiency and reducing the cost.SOLUTION: A prober includes a wafer chuck 16, a movement and rotation mechanism of the w...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMAGUCHI AKIRA, MURAKAMI KONOSUKE, SHIGESAWA YUJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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