EXHAUST TRAP

EXHAUST TRAP

PROBLEM TO BE SOLVED: To improve a collection rate of a whole trap, and prevent blockage in a flow pass.SOLUTION: Provided is an exhaust trap 1 including: plural baffle plates 2 interfering with a gas flow; and a trap chamber 3 accommodating the baffle plates 2 inside. In the baffle plates 2, a gas...

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Bibliographische Detailangaben
Hauptverfasser: BABA TETSUJI, SODA TOMOYUKI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATION
TRANSPORTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To improve a collection rate of a whole trap, and prevent blockage in a flow pass.SOLUTION: Provided is an exhaust trap 1 including: plural baffle plates 2 interfering with a gas flow; and a trap chamber 3 accommodating the baffle plates 2 inside. In the baffle plates 2, a gas passage hole 21 is formed, and the gas passage hole 21 is formed at a position separated by a prescribed distance from inner walls of the trap chamber 3. On an outer wall side of the trap chamber 3, a cooling device 4 is mounted.SELECTED DRAWING: Figure 2 【課題】トラップ全体の捕集率を向上させるとともに、流路の閉塞を抑止できるようにする。【解決手段】ガスの流れを干渉する複数のバッフルプレート２と、バッフルプレート２を内部に備えるトラップ室３と、を備える排気トラップ１であって、バッフルプレート２は、ガス通過孔２１が形成されており、ガス通過孔２１は、トラップ室３の内壁から所定距離離れた位置に形成されており、トラップ室３の外壁側には冷却装置４が配置されている。【選択図】図２