INACTIVATION PREVENTION METHOD OF FLUORINE RADICAL

PROBLEM TO BE SOLVED: To prevent inactivation of fluorine radical at a low running cost, without using a large scale device.SOLUTION: When supplying fluorine radicals generated in a radical generation source to a processing chamber, an oxidization passivity film is formed previously on the inner sur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ONO YOSHIHIDE, AIDA TOSHIHIRO, IZUMI KOICHI, NISHIDA KAZUYA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!