HIGH FREQUENCY SUPPLY STRUCTURE

PROBLEM TO BE SOLVED: To provide a high frequency supply structure capable of suppressing high frequencies from being less likely to be supplied to a work.SOLUTION: A high frequency supply structure 30 comprises a center conductor 31 extending in a predefined direction X, an outer conductor 32 arran...

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Bibliographische Detailangaben
Hauptverfasser: SATO TAKAYASU, TSUBOI HIROKI, NAKADA HIROMICHI, SATOU YOUJI, TACHIBANA KAZUTAKA
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a high frequency supply structure capable of suppressing high frequencies from being less likely to be supplied to a work.SOLUTION: A high frequency supply structure 30 comprises a center conductor 31 extending in a predefined direction X, an outer conductor 32 arranged coaxially with the center conductor 31 and grounded, and an insulation member 35 in a cylindrical shape provided between the center conductor 31 and outer conductor 32. Then a tip of the center conductor 31 is a support part 33 supporting a work W. A deposition preventive member 34 arranged coaxially with the outer conductor 32 and center conductor 31 is arranged outside the outer conductor 32, and a tip 34e of the deposition preventive member 34 is located on the side of a support member 33 in the predefined direction X with respect to a tip 32e of the outer conductor 32. A projection part 36 which is a part, projecting from an opening of the outer conductor 32 toward the support part 33, of the insulation member 35 faces the tip 32e of the outer conductor 32 in the predefined direction X.SELECTED DRAWING: Figure 2 【課題】ワークに高周波が供給されにくくなることを抑制できる高周波供給構造を提供する。【解決手段】高周波供給構造30は、規定方向Xに延伸する中心導体31と、中心導体31と同軸配置されており、且つグランドに接地されている外側導体32と、中心導体31と外側導体32との間に設けられている円筒形状の絶縁部材35とを備える。そして、中心導体31の先端がワークWを支持する支持部33となっている。外側導体32よりも外側には、外側導体32及び中心導体31と同軸配置されている防着部材34が配設され、防着部材34の先端34eは、外側導体32の先端32eよりも規定方向Xにおける支持部33側に位置している。絶縁部材35のうち外側導体32の開口から支持部33側に突出する部分である突出部分36は、外側導体32の先端32eと規定方向Xにおいて対向している。【選択図】図2