FOREIGN SUBSTANCE DETECTION METHOD

PROBLEM TO BE SOLVED: To provide a foreign substance detection method which can detect foreign substances in a wider range with a higher detection accuracy and also can reduce the complexity of configuration and the cost of a device used for the detection.SOLUTION: Foreign substance is detected by dynamically acquiring information on the temperature distribution in a region to be subjected to detection of foreign substances. For the detection, the region to be subjected to the detection of foreign substance is heated for a specific time, and when the heating is over, information on the time change of the temperature distribution in the region is acquired. After that, the presence of mixed foreign substances is determined based on the acquired information on the time change of the temperature distribution.SELECTED DRAWING: Figure 1 【課題】検出できる異物の範囲を拡大でき、且つその検出精度を向上できるようにするとともに、検出を実施する装置の構成の簡単化および低廉化に資することができる異物検出方法を提供する。【解決手段】異物の検出対象となる領域の温度分布の情報を動的に取得して異物検出を行う。そのために、異物の検出対象となる領域を所定期間加熱し、加熱終了後において、当該領域の温度分布の時間的変化の情報を取得し、当該取得した温度分布の時間的変化の情報に基づいて、異物の混入の有無を判定する。【選択図】図１