MASK ADSORPTION EQUIPMENT

PROBLEM TO BE SOLVED: To provide a mask adsorption equipment of a high universal quality capable of adsorbing various masks excellently by a substrate, without arraying magnets for various masks of different mask patterns.SOLUTION: A mask adsorption equipment is mounted on the surface side of a substrate 1 and is caused to adsorb a mask 2 disposed on the surface side of a substrate 1, and is adsorbed by a magnetic force to the mask 2 disposed on the surface side of the substrate 1. Magnet arrays 5, which are constituted by arranging an N-pole portion 3 of an N pole on a face confronting said mask 2 and an S-pole 4 portion of an S pole on a face confronting said mask, are juxtaposed at an interval having a longitudinal direction arranged and capable of opposing said mask 2. The magnetic arrays 5 are juxtaposed over a region entirety at an interval in the longitudinal direction, so that the array phases of said N-pole portion 3 and said S-pole portion 4 are offset between said magnet arrays 5 adjoining.SELECTED DRAWING: Figure 2 【課題】マスクパターンが異なる種々のマスク毎に磁石配列を変更する必要なく、種々のマスクを良好に基板に吸着させることが可能なユニバーサル性の高いマスク吸着装置の提供。【解決手段】基板１の表面側に設けられたマスク２をこの基板１に磁力によって吸着させる、基板１の裏面側に設けられるマスク吸着装置であって、前記マスク２と対向する面がＮ極となるＮ極部３と、前記マスク２と対向する面がＳ極となるＳ極部４とが周期的に配設されて構成された磁石列５を、その長手方向を揃えて間隔をおいて前記マスク２が対向し得る領域全体にわたって並設し、この磁石列５の前記Ｎ極部３及び前記Ｓ極部４の配列位相を隣接する前記磁石列５同士でずれた状態とする。【選択図】図２