SUBSTRATE PROCESSING APPARATUS, JIG FOR MAINTENANCE, MAINTENANCE METHOD OF SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM

PROBLEM TO BE SOLVED: To detect the height position of a lift pin promptly, in a substrate processing apparatus capable of freely protrude and retract for a placing table of a substrate, and including multiple lift pins for delivering the substrate.SOLUTION: A jig 7 provided with a lighting circuit in a container 71, having the bottom formed with the same size as that of a substrate, is prepared. The bottom of the container 71 is constituted of a conductive path plate 72, an insulation material 23 is provided around a region P1 for insulating the region P1 corresponding to one lift pin 4 and the other region P2, and the opposite ends of the lighting circuit are connected with the regions P1, S2, respectively. When placing the jig 7 on a placing table 2, and bringing the other lift pin 4 into contact with the region P2 in a state where the one lift pin 4 is in contact with the region P1, the lift pines 4 are interconnected electrically, and thereby an LED 77 in the jig 7 is lighted. Light at this time is detected by a photodetector 60, and a servo motor 5 of an adjustment object lift pin 4 is controlled.SELECTED DRAWING: Figure 2 【課題】基板の載置台に対して突没自在で、基板の受け渡しを行うための複数のリフトピンを備えた基板処理装置において、リフトピンの高さ位置の検出を速やかに行うこと。【解決手段】底部が基板と同じ大きさに形成された容器７１内に点灯回路が設けられた治具７を用意する。容器７１の底部は導電路プレート７２により構成され、一本のリフトピン４に対応する領域Ｐ１と他の領域Ｐ２とを絶縁するために領域Ｐ１の周囲に絶縁材２３が設けられ、点灯回路の両端は夫々領域Ｐ１、Ｓ２に接続される。治具７を載置台２に載置し、領域Ｐ１に１本のリフトピン４を接触させた状態で他のリフトピン４を領域Ｐ２に接触させると、リフトピン４同士は電気的に接続されていることから、治具７内のＬＥＤ７７が点灯する。このときの光を光検出部６０で検出し、調整対象のリフトピン４のサーボモータ５を制御する。【選択図】図２