ELECTROMECHANICAL CONVERTER
PROBLEM TO BE SOLVED: To provide an electromechanical converter or the like that can prevent light from entering a reception surface without deteriorating mechanical characteristics of a vibration film.SOLUTION: An electromechanical converter includes at least one cell structure 2 of movably support...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an electromechanical converter or the like that can prevent light from entering a reception surface without deteriorating mechanical characteristics of a vibration film.SOLUTION: An electromechanical converter includes at least one cell structure 2 of movably supporting a vibration film 7 including one electrode 8 of two electrodes 3 and 8 having a gap 5 in between. In the electromechanical converter, on the vibration film 7 provided is a stress relaxation layer 9 having acoustic impedance matched with the vibration film 7, and a light reflection layer 6 is provided on the stress relaxation layer 9.SELECTED DRAWING: Figure 1
【課題】振動膜の機械特性を劣化させずに、受信面に光が入射することを防止することができる電気機械変換装置などを提供する。【解決手段】電気機械変換装置は、間隙5を挟んで設けられた2つの電極3、8のうちの一方の電極8を含む振動膜7が可動に支持されたセル構造2を少なくとも1つ有する。電気機械変換装置では、振動膜7上に、振動膜7と音響インピーダンスがマッチングした応力緩和層9が設けられ、応力緩和層9上に光反射層6が設けられている。【選択図】図1 |
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