FLUORINE-CONTAINING ORGANIC SOLVENT RECOVERY APPARATUS AND SUBSTRATE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To effectively recover a fluorine-containing organic solvent.SOLUTION: A recovery device 30 includes: a recovery tank 36; and a supply nozzle 37 for supplying a fluorine-containing organic solvent to the recovery tank 36. The supply nozzle 37 is attached to the float 39, and th...

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Bibliographische Detailangaben
Hauptverfasser:	MINAMI TERUOMI, MITSUOKA KAZUYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Zusammenfassung:	PROBLEM TO BE SOLVED: To effectively recover a fluorine-containing organic solvent.SOLUTION: A recovery device 30 includes: a recovery tank 36; and a supply nozzle 37 for supplying a fluorine-containing organic solvent to the recovery tank 36. The supply nozzle 37 is attached to the float 39, and the lower end of the supply nozzle 37 is located in a water layer 36a in the recovery tank 36.SELECTED DRAWING: Figure 7 【課題】フッ素含有有機溶剤を効果的に回収する。【解決手段】回収装置３０は回収タンク３６と、回収タンク３６へフッ素含有有機溶剤を供給する供給ノズル３７とを備えている。供給ノズル３７は浮き子３９に取付けられており、供給ノズル３７の下端は回収タンク３６内の水層３６ａ内に位置する。【選択図】図７