ABNORMALITY DETECTION DEVICE AND ABNORMALITY DETECTION METHOD OF FLUID BEARING
PROBLEM TO BE SOLVED: To provide an abnormality detection device and abnormality detection method of a fluid bearing, capable of detecting occurrence of clogging in a flow passage of an orifice, and capable of cleaning the orifice at proper timing.SOLUTION: An abnormality detection device of a fluid...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an abnormality detection device and abnormality detection method of a fluid bearing, capable of detecting occurrence of clogging in a flow passage of an orifice, and capable of cleaning the orifice at proper timing.SOLUTION: An abnormality detection device of a fluid bearing includes: a bearing body 2; a bearing hole 3 formed in the bearing body 2; a plurality of pockets 4 opened on an inner peripheral surface of the bearing hole 3 and arranged with intervals around a center axis O of the bearing hole 3; a plurality of flow passages 28 communicating with the plurality of pockets 4; an orifice 5 detachably disposed in the flow passage 28; a plurality of pressure sensors 22 configured to measure fluid pressure held in the plurality of pockets 4; and a control unit 27. The control unit 27 is configured to, when among pressure measurement values measured by the plurality of pressure sensors 22, the difference between a maximum value and a minimum value is a predetermined value or more, detect abnormality.SELECTED DRAWING: Figure 2
【課題】オリフィスの流路に詰まりが生じたことを検知することができ、適正なタイミングでオリフィスの清掃を行うことができる流体軸受の異常検知装置及び異常検知方法を提供すること。【解決手段】軸受本体2と、前記軸受本体2に形成された軸受孔3と、前記軸受孔3の内周面に、該軸受孔3の中心軸O回りに互いに間隔をあけて開口する複数のポケット4と、複数の前記ポケット4に連通する複数の流路28と、前記流路28に着脱可能に配設されるオリフィス5と、複数の前記ポケット4に保持される流体の圧力を測定する複数の圧力センサー22と、制御部27と、を備え、前記制御部27は、複数の前記圧力センサー22が測定した圧力の測定値のうち、最大値と最小値との差が所定値以上となったときに、異常を検知することを特徴とする。【選択図】図2 |
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