SPINDLE ROTATION UNIT AND TABLE STRUCTURE

PROBLEM TO BE SOLVED: To provide a spindle rotation unit and a table structure which can cause a driving motor for rotating a spindle to easily correspond to a change of arrangement position of the spindle even when the arrangement position of the spindle to be attached to any of a plurality of attachment parts which are arrayed on a substrate is changed.SOLUTION: A spindle rotation unit includes: a plate 12 for a motor; a motor attachment flange 13 fitted to the plate 12 for the motor; a driving motor 14 which is fitted to the motor attachment flange 13; and a transmission member 15 which connects the driving motor 14 and the spindle 9 and transmits a rotation driving force of the driving motor 14 to the spindle 9. Therein, an opening part 25 to which the transmission member 15 is inserted is formed on the motor attachment flange 13 and the motor attachment flange 13 is arranged position-adjustably so as to open the opening part 25 toward the spindle 9 with respect to the plate 12 for the motor.SELECTED DRAWING: Figure 5 【課題】基材に配列する複数の取付部のいずれかに取り付けられるスピンドルの配置位置を変更しても、該スピンドルを回転させる駆動モータを容易に対応させて配設できること。【解決手段】モータ用プレート１２と、モータ用プレート１２に装着されるモータ取付フランジ１３と、モータ取付フランジ１３に装着される駆動モータ１４と、駆動モータ１４とスピンドル９とを連結し、駆動モータ１４の回転駆動力をスピンドル９に伝達する伝達部材１５と、を備え、モータ取付フランジ１３には、伝達部材１５が挿通される開口部２５が形成され、モータ用プレート１２に対してモータ取付フランジ１３は、スピンドル９に向かって開口部２５を開口させるように、位置調整可能に配設される。【選択図】図５