PARTICLE DETECTION DEVICE AND INSPECTION METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a particle detection device which allows inspection of an optical system including a flow cell to be performed easily.SOLUTION: A particle detection device includes: an inspection light source 30 for emitting inspection light; a flow cell 40 which is irradiated with the inspection light, and which is filled with fluid; and an imaging unit 90 for imaging a shape of reaction light which is generated by the inspection light traversing the fluid in the flow cell 40 and which has a different wavelength from the inspection light. Here, the fluid is, for example, liquid. The reaction light is Raman scattering light or fluorescence.SELECTED DRAWING: Figure 1 【課題】フローセルを含む光学系の検査が容易な粒子検出装置を提供する。【解決手段】検査光を発する検査光源３０と、検査光を照射される、流体で満たされるフローセル４０と、フローセル４０内の流体を横切る検査光によって生じた、検査光とは波長が異なる反応光の形状を撮像する撮像装置９０と、を備える粒子検出装置。ここで、流体とは、例えば液体である。反応光は、ラマン散乱光又は蛍光である。【選択図】図１