SURFACE EMITTING LASER ELEMENT, SURFACE EMITTING LASER ARRAY, IMAGE FORMATION DEVICE, IMAGE DISPLAY DEVICE, LASER WORKING MACHINE, LASER ANNEALING DEVICE, IGNITION DEVICE, AND METHOD FOR MANUFACTURING SURFACE EMITTING LASER ELEMENT

PROBLEM TO BE SOLVED: To provide a surface emitting laser element which enables the increase in reliability.SOLUTION: A surface emitting laser element comprises: a mesa including at least an active layer and a second reflection mirror, and formed from a laminate arranged by stacking, on a substrate,...

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Hauptverfasser: IRINODA MITSUGI, FUSE AKIHIRO
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a surface emitting laser element which enables the increase in reliability.SOLUTION: A surface emitting laser element comprises: a mesa including at least an active layer and a second reflection mirror, and formed from a laminate arranged by stacking, on a substrate, a lower semiconductor DBR (first reflection mirror), an active layer, and an upper semiconductor DBR (second reflection mirror) in this order. A p-side electrode wiring line 110 for injecting a current into the active layer 105 is provided on the mesa and its peripheral part. The p-side electrode wiring line 110 includes a first wiring layer 110-1 and a second wiring layer 110-2; the constituent particles of the second wiring layer partially enter cavities between constituent particles of the first wiring layer 110-1.SELECTED DRAWING: Figure 9 【課題】 信頼性を向上できる面発光レーザ素子を提供すること。【解決手段】 面発光レーザ素子は、基板上に下部半導体DBR(第1の反射鏡)と、活性層と、上部半導体DBR(第2の反射鏡)とがこの順に積層された積層体に、少なくとも活性層及び第2の反射鏡を含むメサが形成された面発光レーザ素子において、活性層105に電流を注入するためのp側電極配線110がメサ上及びその周辺部上に設けられ、p側電極配線110は、第1の配線層110−1と、該第1の配線層110−1の構成粒子間の空隙に一部の構成粒子が入り込んでいる第2の配線層110−2と、を含む。【選択図】図9