HIGH-FREQUENCY POWER SOURCE

PROBLEM TO BE SOLVED: To provide a high-frequency power source that can output high-frequency electric power as a desired waveform that changes at high-speed.SOLUTION: A high-frequency power source 1 includes two DC-RF conversion units 4A, 4B, and an RF combining unit 5 for combining outputs of both...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KASAI YOSHINOBU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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