IONIZATION VACUUM MEASURING CELL

PROBLEM TO BE SOLVED: To provide an improved ionization vacuum measuring cell.SOLUTION: An ionization vacuum measuring cell comprises an anode (3) and a cathode (4) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for...

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Bibliographische Detailangaben
Hauptverfasser: BERNHARD ANDREAUS, RUDOLF STOCKER, ROLF ENDERES, WUEST MARTIN, OSKAR UNTERMARZONER
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an improved ionization vacuum measuring cell.SOLUTION: An ionization vacuum measuring cell comprises an anode (3) and a cathode (4) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).SELECTED DRAWING: Figure 7 【課題】改良された電離真空測定セルを提供する。【解決手段】電離真空測定セルは、陽極(3A)と陰極(4K)とを測定チャンバ(107)内に含む。測定チャンバ(107)は、外側に向かって陰極(4K)の接続ロッド(104)のための真空気密フィードスルー(103)を有するハウジング(101)内に配置される。測定チャンバ(107)は、ロッド(104)を、絶縁性のみであるフィードスルー(109)において保持する。ハウジング(101)における測定チャンバ(107)は、解放可能なプラグ接続(106)によって交換され得る。【選択図】図7