SILOXANE POLYMER COMPOSITION AND METHOD FOR USING THE SAME

PROBLEM TO BE SOLVED: To provide a negative tone siloxane polymer composition for aqueous basic developer system.SOLUTION: There are provided a siloxane composition which contains a siloxane prepolymer having a functional group capable of deprotonated in a basic aqueous solution and a functional gro...

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Hauptverfasser:	SACHA LEGRAND, ARI KARKKAINEN, MILJA HANNU-KUURE, AMIR HADZIC, GRAEME GORDON
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS MATERIALS THEREFOR METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF THEIR PREPARATION OR CHEMICAL WORKING-UP USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a negative tone siloxane polymer composition for aqueous basic developer system.SOLUTION: There are provided a siloxane composition which contains a siloxane prepolymer having a functional group capable of deprotonated in a basic aqueous solution and a functional group reactable during a curing step started by heat or radiation and having an average molecular weight of approximately 500-20,000 g/mol, particularly, 1,000-10,000 g/mol, a solvent and a photocurable compound; the siloxane composition, where an organosiloxane polymer contains 1 mol% or more, preferably, 5 mol% or more of a unit derived from a monomer having one or more deprotonation groups; and the siloxane composition, where the solid concentration is preferably 1-70 wt.%.SELECTED DRAWING: None 【課題】水性の塩基性現像剤システム用のネガティブトーンシロキサンポリマー組成物の提供。【解決手段】塩基性水溶液中で脱プロトン化可能な官能基と熱又は放射線で開始される硬化工程中に反応可能な官能基とを有する平均分子量が約５００〜２０，０００ｇ／ｍｏｌ、特に約１０００〜１００００ｇ／ｍｏｌのシロキサンプレポリマーと、溶媒と、光反応性化合物と、含むシロキサン組成物。オルガノシロキサンポリマーが脱プロトン化可能基を１個以上備えるモノマーに由来する単位を１モル％以上、好ましくは、５モル％以上含有することが望ましいシロキサン組成物。固体濃度が、好ましくは１〜７０重量％であるシロキサン組成物。【選択図】なし