RADIATION DETECTOR AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a manufacturing method of a radiation detector capable of achieving high brightness by increasing sensitivity to radiation.SOLUTION: The radiation detector includes a sensor substrate, a scintillator layer, and a partition wall. The sensor substrate includes plural p...

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Bibliographische Detailangaben
Hauptverfasser:	OGUCHI SHINICHI, IGARASHI TAKAHIRO, KAWANISHI MITSUHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a manufacturing method of a radiation detector capable of achieving high brightness by increasing sensitivity to radiation.SOLUTION: The radiation detector includes a sensor substrate, a scintillator layer, and a partition wall. The sensor substrate includes plural pixels each of which can receive light. The scintillator layer is formed on the sensor substrate. The partition wall has a height of 300-800 μm and width of 10-40 μm and is formed to partition the scintillator layer for each pixel. Over the scintillator layer which is formed by filling a scintillator material, a cap layer is formed by transferring a sheet material which contains a fluorescent material and a resin material.SELECTED DRAWING: Figure 1 【課題】放射線の高感度化による高輝度化を実現した放射線検出器の製造方法を提供すること。【解決手段】放射線検出器は、センサ基板と、シンチレータ層と、隔壁とを具備する。前記センサ基板は、受光可能な複数の画素を有する。前記シンチレータ層は、前記センサ基板上に設けられている。前記隔壁は、３００μm以上８００μm以下の高さ、及び、１０μm以上４０μm以下の幅を有し、前記シンチレータ層を画素ごとに区画するように設けられている。シンチレータ材料の充填により形成されたシンチレータ層上に、蛍光体材料及び樹脂材料を含むシート材料が転写されることでキャップ層が形成される。【選択図】図１