DEFECT DETECTION DEVICE

PROBLEM TO BE SOLVED: To provide a defect detection device that can detect a defective portion with higher accuracy.SOLUTION: A defect detection device 1 comprises: an irradiation unit 22 that irradiates an inspection object surface W1 with laser beam; a light reception unit 23 that receives reflection light of the laser beam with which the inspection object surface W1 is irradiated; a height data correction unit 33 that calculates three-dimensional shape data (Xa, Yb, and Zab_c) expressing a three-dimensional shape of the inspection object surface W1 on the basis of information on the reflection light received at the light reception unit 23; a non-defective product shape data calculation unit 34 that subjects the three-dimensional shape data (Xa, Yb, and Zab_c) to low-pass filter processing, and thereby calculates non-defective product shape data (Xa,Yb, and Zab*); and a first defect candidate detection unit 37 that compares the three-dimensional shape data (Xa, Yb, and Zab_c) with the non-defective product shape data (Xa, Yb, and Zab*), and thereby detects a defect candidate DZ based on the three-dimensional shape data on the inspection object surface W1.SELECTED DRAWING: Figure 2 【課題】 より精度良く欠陥部分を検出することができる欠陥検出装置を提供すること。【解決手段】 欠陥検出装置１は、検査対象面Ｗ１にレーザー光を照射する照射部２２と、検査対象面Ｗ１に照射されたレーザー光の反射光を受光する受光部２３と、受光部２３にて受光した反射光に関する情報に基づいて、検査対象面Ｗ１の三次元形状を表す三次元形状データ（Ｘａ，Ｙｂ，Ｚａｂ＿ｃ）を算出する高さデータ補正部３３と、三次元形状データ（Ｘａ，Ｙｂ，Ｚａｂ＿ｃ）をローパスフィルタ処理することにより、良品形状データ（Ｘａ，Ｙｂ，Ｚａｂ＊）を算出する良品形状データ算出部３４と、三次元形状データ（Ｘａ，Ｙｂ，Ｚａｂ＿ｃ）と良品形状データ（Ｘａ，Ｙｂ，Ｚａｂ＊）を比較することにより、検査対象面Ｗ１の三次元形状に基づく欠陥候補ＤＺを検出する第一欠陥候補検出部３７と、を備える。【選択図】 図２