PRODUCTION METHOD OF ZIRCONIA FILM

PROBLEM TO BE SOLVED: To provide a method for depositing a white zirconia film of a thickness of a few dozens μm or more on a substrate.SOLUTION: A production method of a zirconia film includes a crushing step, an aerosol forming step, and an aerosol spraying step. In the crushing step, zirconia powder of which the particle size distribution has a single mountain and a peak in a range of 10-20 μm is crushed by a planetary ball mill. The particle size distribution of the crushed powder is adjusted so as to have two mountains where a first peak is in a range of particle size of 5-15 μm, a second peak lower than the first peak in a range of particle size of 0.2-0.8 μm, and a height ratio of the first peak and the second peak of 5-15, which is a volume ratio of the particles. In the aerosol forming step, an aerosol in which the particles of the zirconia powder prepared in the crushing step are dispersed in a gas is formed in a closed vessel. In the aerosol spraying step, the aerosol is sprayed from the closed vessel toward a substrate put in a film deposition chamber having a lower pressure than the closed vessel.SELECTED DRAWING: Figure 1 【課題】基材上に数十μｍ以上の膜厚で白色のジルコニア膜を成膜する方法を提供する。【解決手段】ジルコニア膜の製造方法は、粒度分布が一山分布でありピークが１０〜２０μｍの範囲内にあるジルコニア粉末を遊星ボールミルにより粉砕して、粒径５〜１５μｍの範囲内に第１のピークを有し、粒径０．２〜０．８μｍの範囲内に第１のピークよりも低い第２のピークを有し、かつ粒子の体積比である第１および第２のピークの高さの比が５〜１５である二山分布になるように、粒度分布を調整する粉砕工程と、粉砕工程で調整されたジルコニア粉末の粒子が気体中に分散したエアロゾルを密閉容器内で生成する生成工程と、密閉容器よりも低圧の成膜室内に収容された基材に向けて、密閉容器からエアロゾルを噴射する噴射工程とを有する。【選択図】図１