SUBSTRATE DIVIDING DEVICE

PROBLEM TO BE SOLVED: To improve precision of a divided surface in dividing a substrate formed of brittle material.SOLUTION: A first holding table 3 and a second holding table 5 have a first holding surface 11 and a second holding surface 21 for holding a substrate respectively, and are arranged adjacently with a clearance 33 between side parts 3a, 5a of both of the holding tables so as to form a horizontal surface by arranging the first holding surface 11 and second holding surface 21 side by side. A turning connection part 7 turnably connects the side parts 3a, 5a of the first holding table 3 and second holding table 5, and has a turning center at a height different from the horizontal surface in a state that the horizontal surface is formed by arranging the first holding surface 11 and second holding surface 21 side by side. The turning connection part 7 includes a first turning connection part 45a which connects first end parts of the side parts 3a, 5a of both of the tables, and a second turning connection part 45b which connects second end parts of the side parts 3a, 5a of both of the tables and has a turning center height different from the first turning connection part 45a.SELECTED DRAWING: Figure 5 【課題】脆性材料からなる基板の分割を行うに際し、分断面の精度を高くする。【解決手段】第１保持テーブル３と第２保持テーブル５は、それぞれ基板を保持するための第１保持面１１、第２保持面２１を有しており、第１保持面１１と第２保持面２１が横に並んで水平面を形成することが可能なように、両保持テーブルの側部３ａ、５ａ同士が隙間３３を空けて隣接する。回動連結部７は、第１保持テーブル３と第２保持テーブル５の側部３ａ、５ａ同士を回動自在に連結しており、第１保持面１１と第２保持面２１が横に並んで水平面を形成した状態において水平面とは異なる高さに回動中心を有する。回動連結部７は、両テーブルの側部３ａ、５ａの第１端部同士を連結する第１回動連結部４５ａと、両テーブルの側部３ａ、５ａの第２端部同士を連結しており第１回動連結部４５ａと回動中心の高さが異なる第２回動連結部４５ｂとを有している、【選択図】図５