FLOW RATE CONTROLLER

PROBLEM TO BE SOLVED: To provide a flow rate controller with which it is possible to suppress manufacturing costs and greatly reduce setup and management burdens.SOLUTION: This flow rate controller 11 comprises a flow rate adjustment valve 21 provided in a channel 13, a flow rate measurement unit 41 for measuring the flow rate of a fluid flowing in the channel 13, and a control unit 61 for controlling the opening of the flow rate adjustment valve 21 on the basis of the measurement result of the flow rate measurement unit 41. As a pressure insufficiency detection function to detect pressure insufficiency at a time when a limit sensor (opening detection sensor) 246 for detecting the opening of the flow rate adjustment valve 21 detects full opening is included, it is possible to greatly reduce manufacturing costs as compared with the case where pressure abnormality is detected using a conventional pressure sensor, and to notify pressure insufficiency when necessary at an early stage before abnormality due to a reduction in flow rate occurs.SELECTED DRAWING: Figure 1 【課題】製造コストを抑え、設定や管理の負担を大幅に軽減することが可能な流量制御装置を提供する。【解決手段】本発明の流量制御装置１１は、流路１３に設けられる流量調節弁２１と、流路１３を流れる流体の流量を測定する流量測定部４１と、流量測定部４１の測定結果に基づき流量調節弁２１の開度を制御する制御部６１と、を備え、流量調節弁２１の開度を検知するリミットセンサ（開度検知センサ）２４６が全開を検知した時点で圧力不足を検知する圧力不足検知機能を有しているため、従来の圧力センサで圧力異常を検知する方式に比べて製造コストを大幅に削減することができ、流量低下による異常が発生する前に圧力不足を早い段階で必要な時期に知らせることが可能になる。【選択図】図１