THREE-DIMENSIONAL MEASURING MACHINE

PROBLEM TO BE SOLVED: To provide a three-dimensional measuring machine that has high visibility and can perform accurate measurement.SOLUTION: A Y-axis movable frame 22 for moving a probe 120 in a Y-axis direction is formed in an L shape, and its one end is movably supported by one Y-axis direct-act...

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Bibliographische Detailangaben
Hauptverfasser:	OKUBO NOBUHIRO, FUSAYASU KAZUHISA, KAWAKAMI TETSUJI, GOMI KEIICHIRO, FUJITA TAKASHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a three-dimensional measuring machine that has high visibility and can perform accurate measurement.SOLUTION: A Y-axis movable frame 22 for moving a probe 120 in a Y-axis direction is formed in an L shape, and its one end is movably supported by one Y-axis direct-acting guide 44 in the Y-axis direction. The other end is floated and supported on a surface plate 14 by an air bearing 70. Thus, the Y-axis movable frame 22 is supported in an oscillatable state about the Y-axis, and deformation such as torsion or deflection of the Y-axis movable frame 22 is prevented.SELECTED DRAWING: Figure 1 【課題】視認性が高く高精度な測定ができる三次元測定機を提供する。【解決手段】プローブ１２０をＹ軸方向に移動させるＹ軸移動フレーム２２は、Ｌ字形状に形成され、一端が１つのＹ軸直動ガイド４４によってＹ軸方向に移動自在に支持される。また、他端がエアベアリング７０によって定盤１４上に浮上支持される。これにより、Ｙ軸移動フレーム２２がＹ軸周りに揺動可能な状態で支持され、Ｙ軸移動フレーム２２の捩れや撓み等の変形が防止される。【選択図】図１