SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD

PROBLEM TO BE SOLVED: To reduce a time for substrate transfer from a hoop to a prescribed place in a substrate inspection device in an operation involving transferring a designated number of substrates from a hoop placed in a loader of the substrate inspection device to a prescribed place and then m...

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1. Verfasser: OBIKANE TADASHI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To reduce a time for substrate transfer from a hoop to a prescribed place in a substrate inspection device in an operation involving transferring a designated number of substrates from a hoop placed in a loader of the substrate inspection device to a prescribed place and then moving the hoop having remaining substrates placed therein for inspection by an another substrate inspection device.SOLUTION: Provided is a prober 100 for inspecting a wafer W, comprising: a loader 110 in which a plurality of wafers W are installed; a buffer 120 capable of temporarily storing the plurality of wafers W; an inspection unit 130 for inspecting the wafers W one at a time; and a conveyance mechanism 140 for conveying the wafers W between the loader 110, the buffer 120, and the inspection unit 130. The conveyance mechanism 140 is provided with a conveyance arm 170 capable of carrying in and carrying out the wafers W between the loader 110 and the buffer 120 while holding at least one or more wafers W collectively, and not doing carry-in and carry-out of the wafers W to and from the inspection unit 130.SELECTED DRAWING: Figure 2 【課題】基板検査装置のローダ部に載置されたフープから指定枚数の基板を所定の場所に移載した後、残存した基板が載置されたフープを別の基板検査装置で検査するために移送するという運用において、フープから基板検査装置内の所定の場所への基板の移載時間を短縮する。【解決手段】ウェハWを検査するプローバ100において、複数のウェハWが設置されるローダ部110と、複数のウェハWを一時的に収容可能なバッファ部120と、ウェハWを1枚ずつ検査する検査部130と、ローダ部110、バッファ部120及び検査部130の間でウェハWを搬送する搬送機構140と、を設け、搬送機構140として、少なくとも1枚以上のウェハWを一括して保持した状態で、ローダ部110及びバッファ部120の間でウェハWの搬入及び搬出が可能であり、且つ、検査部130へはウェハWの搬入及び搬出を行わない搬送アーム170を設ける。【選択図】図2