OXYGEN CONCENTRATION MEASUREMENT DEVICE

PROBLEM TO BE SOLVED: To provide an oxygen concentration measurement device capable of accurately measuring the concentration of oxygen with a simple configuration.SOLUTION: An oxygen concentration measurement device 1 includes: transmitted-light intensity detectors (sensor chip 2, light measurement...

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Hauptverfasser: AIMONO TAKANORI, UOZUMI SHINICHI, MATSUMOTO KOJI, SATSU YOICHI, IKEGAMI KEIICHI, NISHIO KEIJI, YAMAGUCHI YUKI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an oxygen concentration measurement device capable of accurately measuring the concentration of oxygen with a simple configuration.SOLUTION: An oxygen concentration measurement device 1 includes: transmitted-light intensity detectors (sensor chip 2, light measurement unit 3) for detecting the intensity of transmitted light of a detection film 2a; and a controller which performs oxygen concentration measurement processing for measuring the concentration of oxygen in a gas atmosphere on the basis of the intensity of the transmitted light when the concentration of hydrogen in the gas atmosphere is first predetermined concentration.SELECTED DRAWING: Figure 1 【課題】 簡易な構成により、酸素濃度を精度良く測定することが可能な酸素濃度測定装置を提供する。【解決手段】 酸素濃度測定装置1は、検知膜2aの透過光強度を検出する透過光強度検出部(センサチップ2,光測定ユニット3)と、ガス雰囲気中の水素濃度が第1所定濃度であるとき、透過光強度に基づいてガス雰囲気中の酸素濃度を測定する酸素濃度測定処理を行う制御部と、を備える。【選択図】 図1