SURFACE ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE

PROBLEM TO BE SOLVED: To provide a highly reliable surface acoustic wave device by ensuring the bond strength of a surface acoustic wave element and the base, thereby preventing breakage of a bonded part or poor electrical connection of a connection pad and a connection electrode, and to provide a m...

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Hauptverfasser: YOSHIMATSU MASAHIRO, EBARA SHUN, HARADA HIDEJI, SHINADA HIROFUMI, TAKEUCHI TOSHIAKI, WATABE HISATAKA
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a highly reliable surface acoustic wave device by ensuring the bond strength of a surface acoustic wave element and the base, thereby preventing breakage of a bonded part or poor electrical connection of a connection pad and a connection electrode, and to provide a method of manufacturing such a surface acoustic wave device.SOLUTION: A surface acoustic wave device 100 has: a surface acoustic wave element 20 provided with a connection pad 26a and the like; and a base 30 provided with a recess 31 where the surface acoustic wave element 20 is placed, and including a connection electrode 61a and the like to be connected electrically with the connection pad 26a and the like formed in the recess 31. The surface acoustic wave element 20 is held by an adhesive where is placed in the recess 31 with a gap formed between the surface acoustic wave element and the bottom face 31a of the recess 31. The adhesive has: a conductive part 91a and the like, for electrically connecting the connection pad 26a and the like, and the connection electrode 61a and the like; and a reinforcement part 92a and the like, extending at least from the surface acoustic wave element 20 to the inside surface 31b of the recess 31 and adhering to the inside surface 31b.SELECTED DRAWING: Figure 1 【課題】弾性表面波素子とベースとの接着強度を確保し、接着部分の破損や接続パッドと接続電極との電気的な接続不良を防止して、信頼性の高い弾性表面波デバイス及びこのような弾性表面波デバイスの製造方法を提供する。【解決手段】接続パッド26a等を備える弾性表面波素子20と、弾性表面波素子20が配置される凹部31を備えかつ凹部31内に接続パッド26a等と電気的に接続される接続電極61a等が形成されるベース30と、を有する弾性表面波デバイス100であって、弾性表面波素子20は、凹部31の底面31aとの間に隙間を形成した状態で凹部31との間に配置された接着剤により保持され、接着剤は、接続パッド26a等と接続電極61a等とを電気的に接続する導電部分91a等と、少なくとも弾性表面波素子20から凹部31の内側面31bまで延びて内側面31bに接着する補強部分92a等と、を有する。【選択図】図1