MAGNETORESISTANCE EFFECT ELEMENT AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To improve manufacturing efficiency of a magnetoresistance effect element.SOLUTION: A method of manufacturing a magnetoresistance effect element according to one embodiment includes the steps of: sequentially laminating a first ferromagnetic layer, a non-magnetic layer, and a second ferromagnetic layer; forming a resist having a first surface opposed to the second ferromagnetic layer and a second surface located at an opposite side to the first surface, and forming a hole surrounded by the resist; embedding a first film in the hole; removing the resist; forming a second film so that at least a lateral face of the first film is covered with the second film; and etching the first ferromagnetic layer, the non-magnetic layer, and the second ferromagnetic layer laminated by using the first film and the second film as masks.SELECTED DRAWING: Figure 8 【課題】本発明の実施形態は、磁気抵抗効果素子の製造効率を向上させる。【解決手段】実施形態の磁気抵抗効果素子の製造方法は、第１の強磁性層と、非磁性層と、第２の強磁性層と、を順に積層する工程と、前記第２の強磁性層と対向した第１面と、当該第１面とは反対側に位置した第２面と、を有したレジストを形成し、当該レジストによって囲まれたホールを形成する工程と、前記ホールに、第１の膜を埋め込む工程と、前記レジストを除去する工程と、前記第１の膜の少なくとも側面が、第２の膜により覆われるように当該第２の膜を成膜する工程と、前記第１の膜及び前記第２の膜をマスクとして、積層された前記第１の強磁性層と、前記非磁性層と、前記第２の強磁性層と、をエッチングする工程と、を具備する。【選択図】図８